JPH0163134U - - Google Patents

Info

Publication number
JPH0163134U
JPH0163134U JP1987158290U JP15829087U JPH0163134U JP H0163134 U JPH0163134 U JP H0163134U JP 1987158290 U JP1987158290 U JP 1987158290U JP 15829087 U JP15829087 U JP 15829087U JP H0163134 U JPH0163134 U JP H0163134U
Authority
JP
Japan
Prior art keywords
chamber
rotating body
water droplet
transmitting member
substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987158290U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987158290U priority Critical patent/JPH0163134U/ja
Publication of JPH0163134U publication Critical patent/JPH0163134U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
  • Centrifugal Separators (AREA)
JP1987158290U 1987-10-15 1987-10-15 Pending JPH0163134U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987158290U JPH0163134U (en]) 1987-10-15 1987-10-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987158290U JPH0163134U (en]) 1987-10-15 1987-10-15

Publications (1)

Publication Number Publication Date
JPH0163134U true JPH0163134U (en]) 1989-04-24

Family

ID=31438479

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987158290U Pending JPH0163134U (en]) 1987-10-15 1987-10-15

Country Status (1)

Country Link
JP (1) JPH0163134U (en])

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